All spare parts available
Help to repair IVS, YGK, ETAMAX and TOHO tools everywhere in Europe

ServicesMaintenance
Training
Spare parts
Handling robot reparation

Spare parts for all Inspectrology IVS, YGK, ETAMAX and TOHO systems

Eumetrys provides spare parts used in our optical metrology, particles inspection, and layer thickness measurement systems. Your tools are protected from every issues thanks to our new and refurbished spare parts and to our expert team’s skills.

You can find the full list of spare parts we can provide, new or reconditioned with warranty, in the catalogue below:
Manufacturer Source Manufacturer Part # Sub Assembly Number Description Compatible IVS System Image
MAIN FRAME0001-00852-00ASSY, Joystick120/130/135/155/165
Ludl990034MAIN FRAME0002-00040-00Lamp Power Supply 12 volt120/130/135/155/165
MAIN FRAME0260-00010-00Focus Encoder Wheel120/130/135/155/165 
SMIF INDEXER 8"120/130/135/155/165
SMIF INDEXER 6"120/130/135/155/165
IVS COMPUTER0004-00017-00Controller, GSI-21 EIDE120/130/135 
IVS COMPUTER0004-00023-00Controller,16 Bit ISA EIDE120/130/135 
IVS COMPUTER0010-00061-00Flat Panel Monitor Upgrade Kit120/130/135 
IVS COMPUTER0004-00015-00Hard Drive 40G120/130/135
IVS COMPUTER0004-00015-00Hard Drive 40G with ghost120/130/135 
DigicomIVS COMPUTER0002-00034-00PCB, Digital I/O Eight Port - Digicom120/130/135/155 
DigicomIVS COMPUTER0002-00034-01PCB, Digital I/O Eight Port - Digicom New155/165/185 
GalilIVS COMPUTER0002-00156-00PCB, Galil - Autofocus PCB120/130/135/155/165 
MutechIVS COMPUTER0002-00345-00Video Digitizer PCB Mutec165/185 
MatroxIVS COMPUTER0015-00025-00PCB, Matrox 4 board set- EISA120/130 
MatroxIVS COMPUTER0015-00116-00PCB, Matrox 4 board set- ISA135/155 
IVS COMPUTER0002-00166-00Power Supply Computer, AT130/135 
MitsubishiP68uPRINTER THERMAL0004-00005-00Printer - Mitsubishi120/130/135
LEICA INS2000 COMPUTER0001-00353-00ASSY, Front Surface Focus 120/130/135/155/165 
LEICA INS2000 COMPUTER0001-00389-00ASSY,Lamp housing120/130/135/155/165 
LEICA INS2000 COMPUTER0001-00008-00ASSY,PCB,Pneumatic Control120/130/135/155/165 
Cohu4115LEICA INS2000 COMPUTER0300-00107-00COHU Camera, with power supply120/130/135/155
LEICA INS2000 COMPUTER0010-00048-00LEICA Aperture Assembly120/130/135/155/165 
LEICA INS2000 COMPUTER0180-00008-00Halogen Lamp with Tab, 12V 100W120/130/135/155/165 
KLALEICA INS2000 COMPUTER0002-00203-00Laser Focus Module130/135/155 
KLALEICA INS2000 COMPUTER0001-00363-00Leica Microscope Controller120/130/135/155/165 
KLALEICA INS2000 COMPUTER0002-00274-00Leica Basic Board -Old120/130/135/155/165 
KLA301-360.040-007/00LEICA INS2000 COMPUTER0002-00242-00Leica Basic Board -New120/130/135/155/165
KLA301-368.115-007/03LEICA INS2000 COMPUTER0002-00245-00Leica Master Board120/130/135/155/165 
LEICA INS2000 COMPUTER0002-00335-00Leica Turret Motor Assembly120/130/135/155/165 
LEICA INS2000 COMPUTER0300-00150-00GEN2 TURRET MOTOR Kit - Motor + Basic 120/130/135/155/165 
KLA020-650-016-000LEICA INS2000 COMPUTER0002-00289-00Leica Microscope Z Drive120/130/135/155/165
KLA11 020 650 018 000LEICA INS2000 COMPUTER0300-00106-00Leica Turret Nosepeice 6 FOLD120/130/135/155/165 
CYBQROBOT PCB, Prealigner Motor Control Driver130/135/155/165 
CYBQROBOT0002-00206-00PCB, Prealigner Digital/Analog IO130/135/155/165 
CYBQ3000ROBOT0002-00256-00Prealigner Cybeq 3000130/135
IDEROBOT0002-00030-00Prealigner Cybeq 2831120
2550ROBOT0003-02146-01End Effector - Cybeq Robot model 6100 - Ceramic120/130/135
2550ROBOT0003-02146-01End Effector - IDE Robot ROB310 - Ceramic 135/155/165/185/200
IDEROBOT0290-00050-00Gasket, Prealigner Chuck, CYBEQ120/130/135
CYBQROBOT0002-00169-00PCB, ASM CPU Cybeq Robot120/130/135 
CYBQROBOT0002-00164-00PCB, CPU Cybeq Prealigner130/135 
CYBQROBOT0002-00163-00PCB, Motor Controller Cybeq P130/135 
CYBQROBOT0002-00135-00PCB, Prealigner Motor Driver 120 
CYBQROBOT0002-00167-00PCB, Prealigner Motor Driver - 2831120/130/135 
WesternServoROBOT0002-00134-00PCB, R1/R2/Theta Amplifier120/130/135 
ROBOT0002-00131-00PCB, Robot R1/R2 Servo Control120/130/135 
WesternServoROBOT0002-00130-00PCB, Robot Z Axis Amplifier120/130/135 
ROBOT0002-00132-00PCB, Robot Z/Theta Servo Control120/130/135 
ROBOT0002-00033-00PCB, Servo Amplifier120/130/135 
CYBQROBOT0002-00168-00PCB, DATA ACQUISITION CYBEQ PR120 
CYBQ3000ROBOT0002-00256-01CYBEQ Prealigner Controller 1/2 rack130/135
CYBQROBOT0002-00029-01CYBEQ Robot Controller 1/2 Rack130/135
CYBQROBOT0001-00038-00CYBEQ Robot and Prealigner Controller 6100120 
IDE ROBOT0002-00029-00CYBEQ ROBOT 6100120/130/135
IDE 0123-9300-02ROBOT0002-00318-02IDE SPA 310 Controller135/155/165/185/200 
IDE0123-6000ROBOT0002-00318-01IDE SPA 310 Prealigner155/165/185/200
IDE 0125-1200-41ROBOT0002-00323-02IDE ROB 310 Controller155/165/185/200 
IDE 0124-3507-06ROBOT0002-00323-01IDE ROB 310 Robot155/165/185/200 
Metralight14BROBOT0002-00339-01Transparent PA Head AlignX14BALL
INSPSTAGE0001-00786-00ASSY, Vacuum control box - Hi flow120/130/135/155/165 
Ludl73000600STAGE0002-00112-00D/A Card, Stage Controller120
Ludl73000500STAGE0002-00128-00PCB X/Y Stage Controller MAC2000120
Ludl73000503STAGE0002-00129-00PCB, X/Y Motor Drive MAC2000 120
EMULEX / ULTRA:LINKSTAGE0002-00154-00PCB,GEM/SECS Interface120/130/135/155/165 
Ludl73002020STAGE0002-00207-00PCB,Power Supply MAC 2002130/135/155/165
Ludl73002050STAGE0002-00205-00PCB MAC 2002 XY Stage AMP Board130/135/155/165 
Ludl73002061STAGE0002-00206-00PCB, MAC 2002 Digital/Analog IO130/135/155/165 
73002040STAGE0002-00208-00PCB,RS232 Interface MAC 2002130/135/155/165
Ludl99s003STAGE0002-00039-00Stage - Ludl Black Anodized120/130
Ludl99s923STAGE0002-00215-00Stage - Ludl S clear Anodized135
970501STAGE0002-00201-00Mac 2002 Controller - fully populated135/155/165/185